Cascade
CM300xi-ULN
300 mm semi-/ fully-automated probe system for Ultra Low Noise measurements
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300 mm Probe Station for Flicker Noise (1/f), Random Telegraph Signal Noise (RTN or RTS), and Phase Noise Measurements of Ultrasensitive Devices
FormFactor has enhanced it’s industry-leading CM300xi Probe Station with revolutionary technologies to meet new testing capabilities at the 5, 3, and 2 nm technology nodes, targeted for 5G and beyond applications. The new CM300xi-ULN now enables unprecedented measurement performance and achieves four significant industry firsts in the arena of on-wafer, low frequency flicker, RTN, and phase noise testing:
PureLine 3 Technology
First automated probe station to achieve -190dB spectral noise*
Plug In and Go
Integrated TestCell Power Management provides fully managed and filtered AC power to the entire system, prober and instruments
Autonomous 24/7 Operation
Up to 4x faster flicker noise thermal testing on 30 μm pads
Reduce Setup Time and Costs
Exclusive low noise site survey, and system verification services
FormFactor’s new CM300xi-ULN (Ultra Low Noise) is a revolutionary 300 mm wafer probing system designed for highly accurate flicker noise (1/f), random telegraph signal noise (RTN or RTS), and phase noise measurements of ultra-sensitive devices.
With the newly patented PureLine™ 3 technology, the ULN probing system enables up to 32x lower noise (1 kHz), for improved device characterization and modelling at the 7/5/2 nm technology nodes targeted for 5G and beyond applications. By eliminating over 97% of the environmental noise experienced in previous probe systems, the CM300xi-ULN system establishes a new industry gold standard for ultra-low noise measurements.
When integrated with noise test equipment (flicker noise, RTN, phase noise), the CM300xi-ULN offers the industry’s highest test throughput, using Contact Intelligence™ with motorized probe positioners, enabling fully Autonomous DC and low frequency noise probing with multi-DUT layouts for complete hands-free 24/7 operation.
Finally, the CM300xi-ULN takes the complexity out of low noise TestCell optimization. Just plug it in and go. TestCell Power Management eliminates all ground-loop induced TestCell noise and provides fully managed and filtered AC power to the entire system, prober and instruments.
Additionally, FormFactor’s exclusive low-noise Site Survey and System Verifications significantly reduce setup costs and tool deployment time. This allows lab engineers to focus on getting good device data, that can be used to reduce the number of costly re-designs and accelerate time to market with lower development costs.
* Typical noise (dBVrms/√Hz, 1kHz to 1MHz), with prober and thermal system enabled.
Applications: Flicker Noise (1/f), Random Telegraph Noise (RTN), and Phase Noise Measurements of Ultrasensitive Devices
PureLine 3 Technology
- Provides an effectively noise free environment around the device under test (DUT)
- First automated probe station to achieve -190dB spectral noise*
- Up to 32x lower noise (1kHz), for improved device characterization and modelling at the 7/5/2 nm technology nodes targeted for 5G and beyond applications
- Eliminates over 97% of the environmental noise experienced in previous probe systems
- Extensive collection of FormFactor patents, electrical design knowledge, and measurement system IP
Plug In and Go
- World’s first probe station with integrated TestCell Power Management (a TestCell is a connected set of equipment, including test software, instruments, probe station, thermal system, and related measurement accessories such as cables and on-wafer probes)
- Eliminates all ground-loop induced TestCell noise
- Low field emissions
- Provides fully managed and filtered AC power to the entire system, prober and instruments
Autonomous 24/7 Operation
- Up to 4x faster flicker noise thermal testing on 30 μm pads
- ULN optimized motorized DC probe positioners enable fully Autonomous DC and low frequency flicker noise probing over multiple temperatures
- For complete hands-free 24/7 operation
Low Noise Site Survey
- Performed by a FormFactor factory trained engineer to determine the best location to install the ULN system
- Enables a good location to be selected that will limit unwanted environment noise from degrading the TestCell performance
- Significantly reduces setup costs and tool deployment time
- Includes precision measurements of four critical noise sources: floor vibrations ( µg over 0.1Hz to 1KHz range), magnetic field strength (AC milligauss), Power-Line Noise, and Power-Line THD (total harmonic distortion)
System Verification Service
- Included with every CM300xi-ULN probing system
- Demonstrates key specifications and performance tied to the standard product datasheet
- Key product specification parameters are measured such as Spectral Noise Density (dBVrms/√Hz, 1Hz to 20MHz), and AC chuck noise (mV p-p, DC to 2.5GHz)
ULN MicroChamber™
- Probing environment inside the prober and directly surrounding the DUT and wafer chuck area
- Ensures a complete EMI / RFI shielded area
- Provides dark and dry environment for measuring light sensitive transistors, and devices at negative temperatures (<= -60°C) with frost free operation
ULN Power Conditioning Unit
- Provides fully managed and filtered AC power to the entire system – prober and instruments
- Eliminates ground-loops between probe station and instruments that cause significant low frequency noise
- Supplies clean, filtered AC power to the probe station, thermal chiller and controller, wafer loader, powered accessories, and all test instruments
- Provides a unified Emergency Off / Emergency Power control system for safe operation of the whole system and all instruments.
ULN Thermal Filtering Module
- Filters harmful noise generated by external thermal control systems
- The active module significantly reduces high frequency noise by up to 30dB above 1Mhz
ULN Single Point Grounding and Cabling System
- Integrated for all prober accessories
- Low resistance grounding connections
- Low resistance materials and hard connection schemes for mechanical assemblies
- Reduced “antenna effect” injection of unwanted RF noise into the measurement path
ULN SMU Filtering Modules for Accurate PLL Phase Noise
- Newly developed DC filter modules for Source Measure Units (SMU)
- For highly accurate phase noise measurements of devices such as Phase Lock Loop circuits (PLL) and Voltage Controlled Oscillators (VCO)
- Provide ultra-quiet / clean DC supply voltage
- Provide up to 100dB attenuation (50Hz to 80Mhz) with 100mA max DC current handling
- Each SMU filter module supports one channel, and multiple modules can be configured together to provide multi-channel clean power
Industry-Leading High Performance Probes
- Ultra-low, fA-level current and fF-level capacitance measurements from -65 °C to + 300 °C
- Guarantees fully-guarded measurements to fA and fF levels
- Read more: DCP-HTR Probe and DCP 100 Series Probe
Easy manual wafer loading
- Chuck mounted on rollout stage that can be opened manually
- Enables full access to the chuck and the auxiliary sites
- For fast and safe manual loading and unloading of wafers
3D Manual Controls
- Virtual Platen Lift and XY knobs at front
- Intuitive, and precise movement of chuck in X, Y, and Z-direction
- Platen Lift enables extremely rapid and intuitive way in performing many alignment tasks like setting up the contact height
Velox Probe Station Control Software
- User-centered design minimizes training costs and enhances efficiency
- Windows 10 compatibility enables highest performance and safe operation with state-of-the-art hardware
- Comprehensive alignment functions – from simple wafer alignment and mapping to advanced probe-to-pad alignment over multiple temperatures for autonomous semiconductor test
- Simplified operation for inexperienced users: Reduced training costs with Workflow Guide and condensed graphical user interface
- VeloxPro option: SEMI E95-compliant test executive software that enables simplified and safe automation of the entire wafer test cycle
Test Productivity and Material Handling Unit
- Test automation out-of-cassette for higher test cell efficiency for over-night/over-weekend operation
- Handles up to 25 wafers (200 or 300 mm)
- SEMI-standard cassette hot-swap capability
- Very compact fully-automated solution with low footprint
Autonomous DC Measurement Assistant
FormFactor’s Autonomous DC Measurement Assistant enables true hands-free 24/7 wafer probing over temperature and on small pads down to 30 µm. It reduces cost of test and increases throughput by automatically aligning probes-to-pads and managing thermal transition and soak times – without any operator intervention. By dynamically controlling each probe touchdown Auto DC improves test data with optimized contact resistance. Auto DC enables remote operation from home or anywhere in the world.
SourceOne – Certified Pre-Owned Equipment
You want the best price-performance ratio for your wafer probe station? With our Certified Used Equipment we have an attractive option for you.
SourceOne – Factory Refurbishment Program
Extend the use of your probe station for up to another 15 years with our Factory Refurbishment Program.
SourceOne – Trade In / Buy Back Program
We'll take your probe station back for a credit note.
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