PAC200

Product Overview

Semi-/fully- automated cryogenic wafer probing down to 10 K

The PAC200 is a highly-precise semi-automated probe station for wafers and substrates up to 200 mm (with a 300 mm option) in a high vacuum environment, at cryogenic temperatures down to 77 K with liquid nitrogen or down to 10 K with liquid helium. Dry-cooling options are also available.

Designed for industrial environments and major research facilities, it supports a wide range of applications, including DC and RF measurements of the latest silicon, compound semiconductor and superconductor devices, MEMS and optoelectronic tests. Optionally, the PAC200 can also be equipped with an autoloader, turning it into a fully automated cryogenic probe station (see videos below).

The PAC200 supports multiple optical instruments like IR radiation sources (black bodies). Up to eight probe positioners and/or a probe card can be integrated.

Key Features

200 mm Cryogenic Manual Probe Station - Probes Inside the Chamber

Flexibility

Different substrate carriers for wafers up to 200 mm or single dies
Probe cards and/or up to eight positioners
Use with liquid nitrogen or helium, depending on the target temperature. Or use of cryo-cooler for dry-cooling option.
Accessories available, such as black bodies and optical motion analysis tools
Optional upgrade for 300 mm wafer
Designed for industrial environments
Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)
Ideal for small structures

Ice- and Condensation-Free Probing Below 7K for Cryogenic Tests

Stability

Ice- and condensation-free probing down to 77 K (liquid nitrogen) or down to 10 K (liquid helium or cryo-cooler)
Probe positioners placed inside vacuum chamber
Short and stable probe arms
Solid station frame with built-in vibration-isolation
Optional microscope bridge
Precise probe positioning
Excellent measurement accuracy and repeatability
Superior vibration attenuation
Stable image quality for high-resolution microscopes

Ease of Use

Joystick controller
Manual probe positioners with rotary feed-throughs
Front loading capability through load door
Comfortable and easy operation
Quick and ergonomic change of DUT

Velox Probe Station Control Software

User-centered design minimizes training costs and enhances efficiency
Comprehensive alignment functions – from simple wafer alignment and mapping to automated alignment and test of multiple singulated chips, like IR – Focal Plane Arrays
Simplified operation for inexperienced users: Reduced training costs with Workflow Guide and condensed graphical user interface
VeloxPro option: SEMI E95-compliant test executive software that enables simplified and safe automation of the entire wafer test cycle

Applications

IV/CV
MEMS
Opto
RF/mmW/THz

Videos

PAC200 Fully-Automated Cryogenic Probe Station with Loader

The PAC200 cryogenic probe station with loader enables fully-automated wafer handling in a cryogenic environment. This reduces cool-down and warm-up time, increases throughput and lowers liquid nitrogen consumption. Carriers with up to three wafer fragments and/or wafers can be prepared independent from the test cycle at cryogenic temperatures.

SourceOne – Certified Pre-Owned Equipment

You want the best price-performance ratio for your wafer probe station? With our Certified Used Equipment we have an attractive option for you.

SourceOne – Factory Refurbishment Program

Extend the use of your probe station for up to another 15 years with our Factory Refurbishment Program.

SourceOne – Trade In / Buy Back Program

We'll take your probe station back for a credit note.

Downloads

PAC200 Data Sheet

PAC200 Facility Planning Guide

CEC/ICMC 2021 – Fully integrated solution for testing state-of-the-art cryogenic devices

Verification of Wafer-Level Calibration Accuracy at Cryogenic Temperatures

Probe Positioners Brochure

Velox Probe Station Control Software Brochure