Infinity Waveguide Probe

Product Overview

With the advent of Silicon CMOS and SiGe technologies, devices are getting smaller and faster. Test engineers need to validate the performance of their devices up to 500 GHz and beyond in some cases. This component/on-wafer probing solution is designed to meet the challenges of high-frequency probing for advanced on-wafer modeling and characterization while providing low, stable contact resistance on 50 micron pads. At 500 GHz the toughest problem is electrical fields around the probe. The Waveguide Infinity Probe’s new membrane GSG contact tip design reduces stray EM fields near probe tip. Control of EM fields near the tip allows repeatable measurements up to 500 GHz and improved crosstalk performance between the tips.

Key Features

Probe loss is 3 dB typical between 140 and 200 GHz, S11/S22 15 dB typical
Reduced unwanted couplings and transmission modes
Able to shrink pad geometries to 25 x 35 µm (best case)
Typical contact resistance < 0.05 Ω on Al, < 0.02 Ω on Au
WR15, WR12, WR10, WR8, WR6, WR4, WR3, and WR2 bands available.

Videos

Autonomous RF Measurement Assistant

FormFactor’s Autonomous RF Measurement Assistant is the only solution in the market that enables true automatic, hands-free calibration and measurement of RF devices at multiple temperatures.

Autonomous RF Calibration and Wafer Probing Over Temperature at High Frequency

Anthony Lord, Director of the RF Market Segment at FormFactor Inc., demonstrates autonomous calibration monitoring and re-calibration over multiple temperatures at frequencies up to 330GHz.

Downloads

Probe Selection Guide

Infinity Probe Mechanical Layout Rules

Advanced mm-Wave and Terahertz Measurements with Cascade Probe Stations

Autonomous RF Measurement Assistant Brochure

Improving Wafer-Level S-parameters Measurement Accuracy and Stability with Probe-Tip Power Calibration up to 110 GHz for 5G Applications